This thesis describes the work performed on a novel micro-fabrication method for patterning poly(methyl methacrylate) (PMMA) in an economical way. Although PMMA can be exposed using a variety of exposure sources, deep-UV radiation source at 254 nm is of interest because it is relatively inexpensive. This thesis shows that micro-structures as deep as 100µm can be created in commercial grade PMMA using a deep-UV light source. Additionally, to improve the fabrication process, different types of commercial PMMA and developers were characterized. The other major focus of this thesis is the development of a new bonding method for PMMA microfluidics which combines the elements of thermally-assisted solvent bonding and microwave bonding method to produce an economical, simple and high yield bonding process for the sealing of PMMA microfluidics. This new process takes only a few minutes and produces a high strength bond.
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Thesis advisor: Parameswaran, Ash
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