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Real-time feedback system for controlling the optical density of bimetallic thin-film grayscale photomasks
Supplementary file for node/11888 (Supplemental file 1)

Supplementary file for node/11888 (Supplemental file 1)

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Real-time feedback system for controlling the optical density of bimetallic thin-film grayscale photomasks

Author: Dykes, James

2010-12-20

Bimetallic grayscale photomasks consist of a bi-layer thin-film that is converted into a transparent oxide upon laser exposure. The film’s…

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