Design and analysis of liquid-drop accelerometer

Resource type
Thesis type
(Thesis) M.A.Sc.
Date created
2009
Authors/Contributors
Author: Wang, Xu
Abstract
A novel design for a micromachined accelerometer is proposed. The working principle of the proposed design is detection of the movement of a liquid droplet in response to an imposed acceleration. When the acceleration is removed, the accelerometer is automatically re-set by the differential pressure of confined air cushions. Experimental and numerical studies are used to evaluate the feasibility of the design, and to guide the selection of a suitable working fluid. Figures for sensitivity and response time are calculated, and the dependence of these performance parameters on working fluid properties is established. On the basis of these studies, a specific geometry, detection method and choice of materials is recommended, and a MEMS fabrication process for the device is outlined.
Document
Copyright statement
Copyright is held by the author.
Scholarly level
Language
English
Member of collection
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etd4388_XWang.pdf 2.63 MB