MOS capacitor sensor array for hydrogen gas measurement

Palladium-MOS hydrogen sensors have wide applications in the industries. This thesis presents a novel design and development of a hydrogen sensor and sensor array based on MOS capacitor structure. The primary target of the device is the applications in the fuel cell system. In total, three generations of MOS capacitor structures have been designed, fabricated and tested. An empirical model for sensors' response to hydrogen concentrations is established and validated. Experimental results demonstrate that the sensor is highly sensitive to hydrogen gas, and the sensor array, which is based on the third generation structure, is capable of not only hydrogen leaks detection, but leaks location, and gas distribution monitoring. A gas test station and a sensor data acquisition system for the characterization and calibration of sensor array are also devised and implemented. A method and apparatus for gas leaks detection, location and distribution monitoring is provided as well.