Buckled cantilever 3D microstructures for transducer applications

A surface micro-machined cantilever that can be assembled out-of-plane to create transducers is presented in this thesis. The buckled cantilever is designed and fabricated using a polymer-based fabrication technology. Assembly of the cantilever can be done by an unidirectional push using microprobe or wirebonder tip. The out-of-plane height and angle can be controlled by the amount of displacement of the cantilever tip. Numerical analysis and finite element analysis were used to model and predict the shape of the buckled structure. By attaching sensor plates to the cantilever structure, three-axis thermal accelerometers prototypes are also designed. Different designs of the thermal accelerometers were fabricated, packaged, and tested. Measurements show that the thermal accelerometers have good sensitivity in all three axes.