Resource type
Thesis type
(Thesis) M.A.Sc.
Date created
2007
Authors/Contributors
Author: Khosraviani, Kourosh
Abstract
An innovative surface micromachined Pirani pressure sensor with an extreme narrow gap and with atmospheric operating pressure range has been fabricated. By using a very thin layer of sputtered silicon as a sacrificial layer and Xenon Difluoride (XeF2) gas
Document
Copyright statement
Copyright is held by the author.
Scholarly level
Language
English
Member of collection
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