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Photochemical deposition of metal and metal oxide films from amorphous films of inorganic precursors

Resource type
Thesis
Thesis type
(Thesis) Ph.D.
Date created
1996
Authors/Contributors
Author: Blair, Sharon Louise
Copyright statement
Copyright is held by the author.
Permissions
The author has not granted permission for the file to be printed nor for the text to be copied and pasted. If you would like a printable copy of this thesis, please contact summit-permissions@sfu.ca.
Scholarly level
Graduate student (PhD)
Subject
Thin film devices -- Design and construction.
Metallic films -- Electric properties.
Metal oxide.
Photochemistry.
Photolithography.
Language
English
Member of collection
Chemistry Theses
Download file Size
b18337405.pdf 5.59 MB

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