Highly-doped SiC Resonator with Ultra-Large Tuning Frequency Range by Joule Heating Effect

Resource type
Date created
2020-06-27
Authors/Contributors
Abstract
Tuning the natural frequency of a resonator is an innovative approach for the implementation of mechanical resonators in a broad range of fields such as timing applications, filters or sensors. The conventional electrothermal technique is not favorable towards large tuning range because of its reliance on metallic heating elements. The use of metallic heaters could limit the tuning capability due to the mismatch in thermal expansion coefficients of materials forming the resonator. To solve this drawback, herein, the design, fabrication, and testing of a highly-doped SiC bridge resonator that excludes the use of metallic material as a heating element has been proposed. Instead, free-standing SiC structure functions as the mechanical resonant component as well as the heating element. Through the use of the Joule heating effect, a frequency tuning capability of almost ∆f/fo ≈ 80% has been demonstrated. The proposed device also exhibited a wide operating frequency range from 72.3 kHz to 14.5 kHz. Our SiC device enables the development of highly sensitive resonant-based sensors, especially in harsh environments.
Description
The full text of this paper will be available in September, 2022 due to the embargo policies of Materials & Design. Contact summit@sfu.ca to enquire if the full text of the accepted manuscript can be made available to you.
Identifier
DOI: 10.1016/j.matdes.2020.108922
Published as
Guzman, P., Dinh, T., Phan, H.-P., Joy, A. P., Qamar, A., Bahreyni, B., Zhu, Y., Rais-Zadeh, M., Li, H., Nguyen, N.-T., & Dao, D. V. (2020). Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect. Materials & Design, 194, 108922. https://doi.org/10.1016/j.matdes.2020.108922
Publication details
Publication title
Materials & Design
Document title
Highly-doped SiC Resonator with Ultra-Large Tuning Frequency Range by Joule Heating Effect
Date
2020
Volume
194
Issue
108922
Copyright statement
Copyright is held by the author(s).
Scholarly level
Peer reviewed?
Yes
Language
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