A High-Performance Piezoelectric Vibration Sensor

Resource type
Date created
2016-12
Authors/Contributors
Abstract
We are reporting on the design, fabrication, and characterization of wideband, piezoelectric vibration microsensors. Prototypes were fabricated in a commercial foundry process. The entire thickness of the handle wafer was employed to carve the proof-mass of the device, leading to high sensitivity at a reduced chip area. A thin layer of aluminum nitride was used for sensing the displacements of the proof-mass. A continuous membrane was employed for the device structure in order to push undesired modes to high frequencies. Sensors with different geometries were designed and fabricated. Analytic and finite element analyses were conducted to study device response. A lump element model was developed for the piezoelectric vibration sensor and used for the noise modeling of the complete sensor system. Various performance metrics for the devices were characterized experimentally. Fabricated prototypes exhibited sensitivities as high as 350 mV/g with first resonant frequencies of more than 10 kHz. These devices are particularly suited for emerging applications in high-frequency vibration sensing.
Document
Published as
Yaghootkar, B., Azimi, S., Bahreyni, B. "A High-Performance Piezoelectric Vibration Sensor." IEEE Sensors Journal. 17 (13). 2017. 4005-4012. https://doi.org/10.1016/j.matdes.2016.10.011
Publication title
IEEE Sensors Journal
Document title
A High-Performance Piezoelectric Vibration Sensor
Date
2017
Volume
17
Issue
13
Publisher DOI
10.1016/j.matdes.2016.10.011
Copyright statement
Copyright is held by the author(s).
Scholarly level
Peer reviewed?
Yes
Language
Member of collection
Attachment Size
Paper 2.pdf 3.29 MB