Thermal MEMS gyroscope design and characteristics analysis

Thermal MEMS gyroscope characteristics have been studied to optimize gyroscope performance. Different parameters such as gas properties, heaters power and switching frequency have been optimized to increase the device sensitivity. A new Thermal MEMS gyroscope model referred to as “Forced Convection MEMS Gyroscope” has been introduced. In this design the output signal has been increased by adding external force to the system. Parameter optimization to increase the device efficiency has also been investigated. An experimental set up has been presented and the simulation study compared with experimental results. Another model referred to as the “Three-axis MEMS gyroscope" has been defined to measure rotation along three axes of rotation. In this design a single heater replaces the two heaters of previous models. Simulation results have shown that using this design it may be possible to distinguish the rotation signal from the buoyancy effects associated with acceleration.