Resource type
Thesis type
(Thesis) M.A.Sc.
Date created
2013-07-16
Authors/Contributors
Author: Qarehbaghi, Reza
Abstract
Grayscale bimetallic photomasks consist of bi-layer thermal resists (Bismuth-on-Indium or Tin-on-Indium) which become controllably transparent when exposed to a focused laser beam as a function of the absorbed power changing from ~3OD (unexposed) to
Document
Identifier
etd7891
Copyright statement
Copyright is held by the author.
Scholarly level
Supervisor or Senior Supervisor
Thesis advisor: Chapman, Glenn H.
Member of collection
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| etd7891_RQarehbaghi.pdf | 8.77 MB |