Magnetic field sensor using polymer MEMS structures for detection of magnetic fields

This thesis covers the development of a magnetic sensor for application with brain computer interfacing for the detection of motor imagery evoked potentials. For this application, the feasibility of a resonance magnetic cantilever based sensor is investigated via: numerical analysis for feasibility, multilayer structure for layer integration verification, and finally flexible magnetic material characterization for sensing element consideration. The flexible magnetic material that is considered in this thesis is made by the embedding of hard rare earth magnetic (Nd2Fe14B) particles into polydimethylsiloxane (PDMS) and provides a micro-mouldable material with hard magnetic properties. This material provides a couple advantages for design of a small magnetic sensor as it is scalable while being made of a rugged polymer. Additionally, this magnetic material exhibits magnetic rheological properties when exposed to a static magnetic field. While there is additional work needed to complete the sensor design, this thesis shows the feasibility of this design.