(1,1,1-trifluoroacetylacetonato)silver(I) used for photochemical and thermal deposition of silver and silver oxide film and its kinetics

(1,1,1-trifluoroacetylacetonato)silver(I) was synthesized from silver(I) oxide and 1,1,1-trifluoroacetylacetone in dichloromethane. The crystal structure of the silver complex was determined to be of the orthorhombic space group Fddd, with a: 11.442 Å, b: 15.276 Å, c: 31.069 Å, and Z=32. The compound was characterized by FT-IR and 1H and 13C NMR spectroscopy. Photolysis of a solid-state film of this complex at 254 nm leads to a crystalline silver and silver oxide film, composing of 94 mol% silver and 6 mol% oxygen. The resistivity of a film of 250 nm thick was found to be 2.1  cm. Multiple intermediates were observed in the FT-IR spectra during irradiating a solid-state film of this complex. Different photolithographic patterning methods are presented. The thermal decomposition of solid-state films in different environments was investigated. The decomposition rate increased with increasing relative humidity and showed no change with or without oxygen present.