A Wideband, Low-noise Accelerometer Sonar Wave Detection

Peer reviewed: 
Yes, item is peer reviewed.
Scholarly level: 
Faculty/Staff
Final version published as: 

Edalatfar, F., Azimi, S., Qureshi, A. Q. Ahsan, Yaghootkar, B., Keast, A., Friedrich, W., Leung, A., Bahreyni, B. (2017). A wideband, low-noice accelerometer for sonar wave detection. IEEE Sensors Journal 18(2): 1-9. http://dx.doi.org/10.1109/JSEN.2017.2774705 

Date created: 
2018-01
Keywords: 
Accelerometer
Capacitive
Sonar wave detection
Low-noise
Wide-bandwidth
Micro-electromechanical systems
Abstract: 

This paper presents the development of a highperformance micromachined capacitive accelerometer for detection of sonar waves. The device is intended to replace existing hydrophones in towed array sonar systems, and thus, needs to meet stringent performance requirements on noise, bandwidth, and dynamic range, among others. The in-plane, single-axis accelerometer is designed based on a mode-tuning structural platform. A frame was used instead of a solid plate for the proof-mass of the device, allowing us to push undesired vibration modes beyond the operating bandwidth of the device while enabling us to employ a portion of the area for capacitive sensing elements. The designed accelerometer was fabricated on a silicon-on-insulator wafer with 100µm device layer with capacitive gaps of ~2.2µm. The sensitivity of the accelerometer is 4.0V/g with a noise spectral density of better than

Language: 
English
Document type: 
Article
Rights: 
Rights remain with the authors.
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Sponsor(s): 
Natural Sciences and Engineering Research Council of Canada (NSERC)
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